BOOK-CHAPTER
Microstresses in Molybdenum Nitride Thin Films Deposited by Reactive DC Magnetron Sputtering
Year: 2005 Materials science forum Pages: 589-594 Publisher: Trans Tech Publications
Keywords:
Materials science Molybdenum Nitride High-power impulse magnetron sputtering Sputtering Sputter deposition Thin film Metallurgy Optoelectronics Engineering physics Composite material Nanotechnology Layer (electronics) Engineering
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Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
GaN-based semiconductor devices and materials
Physical Sciences → Physics and Astronomy → Condensed Matter Physics
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
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