BOOK-CHAPTER

Microstresses in Molybdenum Nitride Thin Films Deposited by Reactive DC Magnetron Sputtering

Y.G. Shen

Year: 2005 Materials science forum Pages: 589-594   Publisher: Trans Tech Publications
Keywords:
Materials science Molybdenum Nitride High-power impulse magnetron sputtering Sputtering Sputter deposition Thin film Metallurgy Optoelectronics Engineering physics Composite material Nanotechnology Layer (electronics) Engineering

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Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry

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