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JOURNAL ARTICLE
Basics of physical vapour deposition (PVD) processes
Year:
1991
Journal:
Metal Powder Report
Vol:
46 (1)
Pages:
52-52
Publisher:
Elsevier BV
DOI:
10.1016/0026-0657(91)92035-c
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Keywords:
Physical vapor deposition
Vapour deposition
Deposition (geology)
Materials science
Nanotechnology
Geology
Thin film
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Topics
Lubricants and Their Additives
Physical Sciences → Engineering → Mechanical Engineering
Advanced Sensor Technologies Research
Physical Sciences → Engineering → Biomedical Engineering
Advancements in Materials Engineering
Physical Sciences → Engineering → Mechanical Engineering
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