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JOURNAL ARTICLE
Physical vapor deposition (PVD) processes
Donald M. Mattox
Year:
1999
Journal:
Metal Finishing
Vol:
97 (1)
Pages:
417-430
Publisher:
Elsevier BV
DOI:
10.1016/s0026-0576(99)80043-9
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Keywords:
Throughput
Physical vapor deposition
Deposition (geology)
Simple (philosophy)
Process engineering
Vapour deposition
Process (computing)
Chemical vapor deposition
Materials science
Product (mathematics)
Computer science
Nanotechnology
Engineering
Thin film
Telecommunications
Operating system
Geology
Wireless
Metrics
9
Cited By
0.38
FWCI (Field Weighted Citation Impact)
0
Refs
0.66
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Sensor Technologies Research
Physical Sciences → Engineering → Biomedical Engineering
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