Physical vapor deposition (PVD) processes

Donald M. Mattox

doi:10.1016/s0026-0576(02)82043-8

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Physical vapor deposition (PVD) processes

Donald M. Mattox

Year: 2002 Journal: Metal Finishing Vol: 100 Pages: 394-408 Publisher: Elsevier BV

DOI: 10.1016/s0026-0576(02)82043-8

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Keywords:

Physical vapor deposition Deposition (geology) Process (computing) Vapour deposition Materials science Throughput Process engineering Chemical vapor deposition Product (mathematics) Simple (philosophy) Nanotechnology Thin film Computer science Engineering Telecommunications Mathematics Geology

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Physical vapor deposition (PVD) processes

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