JOURNAL ARTICLE
Electron beam evaporation of metal oxide dielectric films
Year: 1968 Journal: Microelectronics Reliability Vol: 7 (3)Pages: 284-284 Publisher: Elsevier BV
Keywords:
Evaporation Electron beam physical vapor deposition Materials science Oxide Cathode ray Dielectric Metal Beam (structure) Electron Engineering physics Optoelectronics Optics Nanotechnology Thin film Physics Metallurgy Thermodynamics Nuclear physics
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Electron and X-Ray Spectroscopy Techniques
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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