JOURNAL ARTICLE
Hard molybdenum coatings prepared by cathodic magnetron sputtering
Year: 1989 Journal: Vacuum Vol: 39 (5)Pages: 495-495 Publisher: Elsevier BV
Keywords:
Molybdenum Cathodic protection Materials science Sputter deposition Cavity magnetron High-power impulse magnetron sputtering Sputtering Metallurgy Chemical engineering Nanotechnology Chemistry Thin film Electrochemistry Electrode Physical chemistry
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Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
Material Properties and Applications
Physical Sciences → Materials Science → General Materials Science
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