JOURNAL ARTICLE

Structure of nitride film hard coatings prepared by reactive magnetron sputtering

Keywords:
Tin Materials science Sputtering Microstructure Sputter deposition Nitride Titanium nitride Zirconium nitride Lattice constant Cavity magnetron Substrate (aquarium) Texture (cosmology) Diffraction Thin film Metallurgy Analytical Chemistry (journal) Composite material Layer (electronics) Optics Nanotechnology Chemistry

Metrics

14
Cited By
0.00
FWCI (Field Weighted Citation Impact)
24
Refs
0.23
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry

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