Hard nanocomposite Ti–Si–N coatings prepared by DC reactive magnetron sputtering

L. Rebouta; Carlos J. Tavares; R Aimo; Z Wang; K.A. Pischow; E. Alves; T.C. Rojas; J.A. Odriozola

doi:10.1016/s0257-8972(00)00934-8

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Hard nanocomposite Ti–Si–N coatings prepared by DC reactive magnetron sputtering

L. Rebouta Carlos J. Tavares R Aimo Z Wang K.A. Pischow E. Alves T.C. Rojas J.A. Odriozola

Year: 2000 Journal: Surface and Coatings Technology Vol: 133-134 Pages: 234-239 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(00)00934-8

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Keywords:

Materials science Nanoindentation Nanocrystalline material Tin Sputter deposition Sputtering Nanocomposite Grain size Transmission electron microscopy Analytical Chemistry (journal) Lattice constant Microstructure Composite material Thin film Metallurgy Diffraction Nanotechnology Optics

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

High-Temperature Coating Behaviors

Physical Sciences → Engineering → Aerospace Engineering

Hard nanocomposite Ti–Si–N coatings prepared by DC reactive magnetron sputtering

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