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BOOK
Micro Electro Mechanical Systems
Qing‐An Huang
Year:
2017
Micro/Nano technologies
Publisher:
Springer Nature
DOI:
10.1007/978-981-10-2798-7
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Keywords:
Microelectromechanical systems
Volume (thermodynamics)
Computer science
Engineering
Systems engineering
Mechanical engineering
Nanotechnology
Materials science
Physics
Metrics
12
Cited By
0.14
FWCI (Field Weighted Citation Impact)
0
Refs
0.81
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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