ScienceGate Book Chapters
Search
About Us
Search
About Us
BOOK
Micro Electro Mechanical Systems
Qing‐An Huang
Year:
2018
Micro/Nano technologies
Publisher:
Springer Nature
DOI:
10.1007/978-981-10-5945-2
Get Full-Text PDF
Get Analytical Report
Keywords:
Materials science
Metrics
3
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.12
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced machining processes and optimization
Physical Sciences → Engineering → Mechanical Engineering
Piezoelectric Actuators and Control
Physical Sciences → Engineering → Control and Systems Engineering
Related Documents
BOOK-CHAPTER
Micro-Electro-Mechanical Systems
Hiroyuki Fujita
Year:
2018
Pages:
130-140
BOOK
Micro Electro Mechanical Systems
Qing‐An Huang
Micro/Nano technologies
Year:
2017
BOOK-CHAPTER
MEMS (Micro-Electro-Mechanical Systems)
Bharat Bhushan
Year:
2016
Pages:
1960-1960
JOURNAL ARTICLE
Micro-opto-electro-mechanical systems
M. Edward Motamedi
Journal:
Optical Engineering
Year:
1994
Vol:
33 (11)
Pages:
3505-3505
BOOK-CHAPTER
Micro-Electro-Mechanical-Systems (MEMS)
Nikos I. Kavallaris
Takashi Suzuki
Mathematics for industry
Year:
2017
Pages:
3-63