MICROBOLOMETERS FABRICATED WITH SURFACE MICROMACHINING WITH a-Si-Ge:H THERMO-SENSING FILMS

BOOK-CHAPTER

Year: 2009 Selected topics in electornics and systems Pages: 287-296 Publisher: World Scientific

DOI: 10.1142/9789814273022_0026

Keywords:

Font Computer science Artificial intelligence

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering