JOURNAL ARTICLE

High-density plasma chemical vapor deposition of amorphous carbon films

A Mousinho

Year: 2003 Journal:   Diamond and Related Materials   Publisher: Elsevier BV
Keywords:
Analytical Chemistry (journal) Chemical vapor deposition Plasma-enhanced chemical vapor deposition Dielectric Carbon film Amorphous solid Materials science Electrical resistivity and conductivity Amorphous carbon Ellipsometry Deposition (geology) Thin film Plasma Chemistry Optoelectronics Nanotechnology Crystallography

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Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Plasma Diagnostics and Applications
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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