A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers

Jiangfeng Wu; G.K. Fodder; L.R. Carley

doi:10.1109/isscc.2002.992289

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A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers

Jiangfeng Wu G.K. Fodder L.R. Carley

Year: 2005 Journal: 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315) Vol: 2 Pages: 348-541

DOI: 10.1109/isscc.2002.992289

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Keywords:

Accelerometer Capacitive sensing Chopper Microelectromechanical systems CMOS Offset (computer science) Electrical engineering Amplifier Noise (video) Electronic engineering Materials science Optoelectronics Engineering Physics Computer science Voltage

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers

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