A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers

Jiangfeng Wu; Gary K. Fedder; L.R. Carley

doi:10.1109/isscc.2002.993115

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A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers

Jiangfeng Wu Gary K. Fedder L.R. Carley

Year: 2003 Journal: 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315) Vol: 1 Pages: 428-478

DOI: 10.1109/isscc.2002.993115

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Abstract

A CMOS chopper-stabilized amplifier with both DC and AC offset cancellation, for capacitive readout of motion in MEMS structures, achieves 40 nV//spl radic/HZ noise floor, 10 mV DC offset, and 40 dB sensor offset reduction. The amplifier, integrated into a CMOS-MEMS accelerometer, achieves 50 /spl mu/g//spl radic/Hz noise floor.

Keywords:

Chopper Capacitive sensing Accelerometer CMOS Amplifier Microelectromechanical systems Electrical engineering Offset (computer science) Noise floor DC bias Materials science Capacitance Optoelectronics Physics Noise reduction Engineering Noise measurement Acoustics Computer science Voltage Electrode

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers

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