BOOK-CHAPTER
SiC Coatings Deposited by RF Magnetron Sputtering
Hui TangShou Hong TanZheng Ren Huang
Year: 2007 Key engineering materials Pages: 1309-1312 Publisher: Trans Tech Publications
Keywords:
Materials science Sputter deposition Sputtering High-power impulse magnetron sputtering Optoelectronics Composite material Metallurgy Thin film Nanotechnology
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Topics
Aluminum Alloys Composites Properties
Physical Sciences → Engineering → Mechanical Engineering
Advanced ceramic materials synthesis
Physical Sciences → Materials Science → Ceramics and Composites
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
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