JOURNAL ARTICLE
Broadband antireflection coatings deposited by magnetron sputtering
Mingli WangHui GongZhengxiu Fan
Year: 1997 Journal: Chinese Science Bulletin Vol: 42 (19)Pages: 1612-1615 Publisher: Springer Nature
Keywords:
Broadband Materials science Sputter deposition Cavity magnetron Optoelectronics Sputtering Optics High-power impulse magnetron sputtering Reflectivity Thin film Nanotechnology Physics
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Topics
Surface Roughness and Optical Measurements
Physical Sciences → Engineering → Computational Mechanics
Optical Coatings and Gratings
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Material Properties and Applications
Physical Sciences → Materials Science → General Materials Science
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