JOURNAL ARTICLE

Vacuum mechatronics and self-contained manufacturing for microelectronics processing

Year: 1992 Journal:   Microelectronics Reliability Vol: 32 (1-2)Pages: 294-294   Publisher: Elsevier BV
Keywords:
Microelectronics Mechatronics Manufacturing engineering Engineering Engineering drawing Computer science Electrical engineering

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Topics

3D IC and TSV technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

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