JOURNAL ARTICLE
Vacuum mechatronics and self-contained manufacturing for microelectronics processing
Year: 1992 Journal: Microelectronics Reliability Vol: 32 (1-2)Pages: 294-294 Publisher: Elsevier BV
Keywords:
Microelectronics Mechatronics Manufacturing engineering Engineering Engineering drawing Computer science Electrical engineering
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FWCI (Field Weighted Citation Impact)
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Refs
0.42
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Topics
3D IC and TSV technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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