Vacuum mechatronics and self-contained manufacturing for microelectronics processing

Abstract

The Center for Robotic Systems in Microelectronics (CRSM) has developed the core of a self-contained automated robotic factory (SCARF). This includes a central chamber with various transfer and monitoring ports, a vacuum-compatible robot for wafer transfer, and a particle monitoring system, all under automation. The cylindrical coordinate SCARF vacuum-compatible robot is unique due to its fully vacuum-compatible motors, closed-loop control, and configuration which makes it an ideal central component for a self contained manufacturing system. The CRSM is currently developing a color vision system for in-vacuum inspection and measurement which will be an integral part of SCARF. Details of the SCARF system and robot are discussed, as well as the key technical issues facing the development of self-contained manufacturing systems.< >