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Biaxially Aligned Yttria Stabilized Zirconia and Titanium Nitride Layers Deposited by Unbalanced Magnetron Sputtering
Stijn MahieuPieter GhekiereG. De WinterRoger De GryseDiederik DeplaOleg I. Lebedev
Year: 2005 Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Pages: 447-452 Publisher: Scientific.net
Keywords:
Materials science Yttria-stabilized zirconia Sputter deposition Titanium nitride Cubic zirconia Titanium Nitride High-power impulse magnetron sputtering Cavity magnetron Sputtering Metallurgy Composite material Optoelectronics Nanotechnology Thin film Ceramic Layer (electronics)
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Electrophoretic Deposition in Materials Science
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced ceramic materials synthesis
Physical Sciences → Materials Science → Ceramics and Composites
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Physical Sciences → Engineering → Automotive Engineering
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