JOURNAL ARTICLE

Oxygen Precipitation in Lightly and Heavily Doped Czochralski Silicon

Koji Sueoka

Year: 2006 Journal:   ECS Meeting Abstracts Vol: MA2006-02 (25)Pages: 1211-1211   Publisher: Institute of Physics

Abstract

Abstract not Available.

Keywords:
Silicon Precipitation Doping Oxygen Materials science Czochralski method Optoelectronics Chemistry Meteorology Physics

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Topics

Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and interfaces
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry

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