Manipulation and Patterning of Surfaces (Nanolithography)

BOOK-CHAPTER

Year: 2018 Elsevier eBooks Pages: 89-137 Publisher: Elsevier BV

DOI: 10.1016/b978-0-323-48057-4.00005-0

Keywords:

Nanolithography Nanotechnology Materials science Medicine Fabrication

Metrics

Cited By

0.51

FWCI (Field Weighted Citation Impact)

Refs

0.69

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Adhesion, Friction, and Surface Interactions

Physical Sciences → Engineering → Mechanics of Materials