JOURNAL ARTICLE
Nanolithography and atomic manipulation on silicon surfaces by STM
F. GreyAtaru KobayashiHironaga UchidaD.H. HuangMasami Aono
Year: 1993 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 10310 Pages: 1031006-1031006 Publisher: SPIE
Keywords:
Nanolithography Silicon Materials science Nanotechnology Optoelectronics Fabrication
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0.35
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Topics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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