JOURNAL ARTICLE

Plating apparatus for x-ray mask fabrication

Year: 2002 Journal:   Metal Finishing Vol: 100 (9)Pages: 89-89   Publisher: Elsevier BV
Keywords:
Plating (geology) Fabrication Materials science Computer science Physics Medicine

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Refs
0.42
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Topics

Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Electron and X-Ray Spectroscopy Techniques
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films

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