JOURNAL ARTICLE
Plating apparatus for x-ray mask fabrication
Year: 2002 Journal: Metal Finishing Vol: 100 (9)Pages: 89-89 Publisher: Elsevier BV
Keywords:
Plating (geology) Fabrication Materials science Computer science Physics Medicine
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0.42
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Topics
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Electron and X-Ray Spectroscopy Techniques
Physical Sciences → Materials Science → Surfaces, Coatings and Films
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