Epitaxial growth of platinum silicide layers on (111) Si substrates

Jiann–Ruey Chen; Tian–Shyng Heh; Ming-Pang Lin

doi:10.1016/0167-2584(85)90320-2

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Epitaxial growth of platinum silicide layers on (111) Si substrates

Jiann–Ruey Chen Tian–Shyng Heh Ming-Pang Lin

Year: 1985 Journal: Surface Science Letters Vol: 162 (1-3)Pages: A610-A610 Publisher: Elsevier BV

DOI: 10.1016/0167-2584(85)90320-2

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Keywords:

Epitaxy Silicide Platinum Materials science Metallurgy Nanotechnology Optoelectronics Chemical engineering Silicon Chemistry Layer (electronics) Catalysis Engineering

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Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Surface and Thin Film Phenomena

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Materials Characterization Techniques

Physical Sciences → Engineering → Biomedical Engineering

Epitaxial growth of platinum silicide layers on (111) Si substrates

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