Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography

王磊 Wang Lei; 李思坤 Li Sikun; 王向朝 Wang Xiangzhao; 闫观勇 Yan Guanyong; 杨朝兴 Yang Chaoxing

doi:10.3788/aos201535.0422002

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Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography

王磊 Wang Lei 李思坤 Li Sikun 王向朝 Wang Xiangzhao 闫观勇 Yan Guanyong 杨朝兴 Yang Chaoxing

Year: 2015 Journal: Acta Optica Sinica Vol: 35 (4)Pages: 0422002-0422002

DOI: 10.3788/aos201535.0422002

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Keywords:

Particle swarm optimization Multi-swarm optimization Lithography Particle (ecology) Algorithm Metaheuristic Computer science Optics Materials science Mathematical optimization Physics Mathematics Geology

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advancements in Photolithography Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced optical system design

Physical Sciences → Engineering → Biomedical Engineering

Source Optimization Using Particle Swarm Optimization Algorithm in Optical Lithography

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