JOURNAL ARTICLE
Source Mask Projector Optimization Method of Lithography Tools Based on Particle Swarm Optimization Algorithm
王磊 Wang Lei李思坤 Li Sikun王向朝 Wang Xiangzhao杨朝兴 Yang Chaoxing
Year: 2017 Journal: Acta Optica Sinica Vol: 37 (10)Pages: 1022001-1022001
Keywords:
Particle swarm optimization Projector Multi-swarm optimization Lithography Computer science Algorithm Metaheuristic Computer vision Optics Physics
Metrics
11
Cited By
0.63
FWCI (Field Weighted Citation Impact)
0
Refs
0.64
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Numerical Analysis Techniques
Physical Sciences → Engineering → Computational Mechanics
Optical Systems and Laser Technology
Physical Sciences → Engineering → Electrical and Electronic Engineering
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