JOURNAL ARTICLE
Silicon nitride films by reactive sputtering
Year: 1968 Journal: Microelectronics Reliability Vol: 7 (4)Pages: 340-340 Publisher: Elsevier BV
Keywords:
Sputtering Silicon nitride Nitride Materials science Optoelectronics Silicon Engineering physics Nanotechnology Thin film Engineering Layer (electronics)
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
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