JOURNAL ARTICLE

Silicon nitride films by reactive sputtering

Year: 1968 Journal:   Microelectronics Reliability Vol: 7 (4)Pages: 340-340   Publisher: Elsevier BV
Keywords:
Sputtering Silicon nitride Nitride Materials science Optoelectronics Silicon Engineering physics Nanotechnology Thin film Engineering Layer (electronics)

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Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry

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