BOOK-CHAPTER
Modeling and Simulation of SU-8 Thick Photoresist Lithography
Year: 2017 Toxinology Pages: 1-31 Publisher: Springer Nature (Netherlands)
Keywords:
Photoresist Lithography Materials science Optoelectronics Nanotechnology
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FWCI (Field Weighted Citation Impact)
94
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0.38
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Citation History
Topics
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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