BOOK-CHAPTER
Modeling and Simulation of SU-8 Thick Photoresist Lithography
Year: 2018 Micro/Nano technologies Pages: 67-97 Publisher: Springer Nature
Keywords:
Resist Photoresist Lithography Materials science X-ray lithography Photolithography Microelectromechanical systems Etching (microfabrication) Nanotechnology Fabrication Computer science Optoelectronics Layer (electronics)
Metrics
2
Cited By
1.39
FWCI (Field Weighted Citation Impact)
105
Refs
0.78
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Image Processing Techniques and Applications
Physical Sciences → Engineering → Media Technology
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