Design, modeling, fabrication, packaging and characterization of MEMS screech sensor

A. Sthuthi; G. Nithya; Veda Sandeep Nagaraja

doi:10.1016/j.matpr.2022.03.028

ScienceGate Book Chapters

JOURNAL ARTICLE

Design, modeling, fabrication, packaging and characterization of MEMS screech sensor

A. Sthuthi G. Nithya Veda Sandeep Nagaraja

Year: 2022 Journal: Materials Today Proceedings Vol: 59 Pages: 1132-1137 Publisher: Elsevier BV

DOI: 10.1016/j.matpr.2022.03.028

Get Full-Text PDF Get Analytical Report

Keywords:

Capacitance Multiphysics Microelectromechanical systems Sensitivity (control systems) Fabrication Acoustics Engineering Instrumentation (computer programming) Thrust Electronic engineering Electrical engineering Mechanical engineering Materials science Computer science Finite element method Optoelectronics Physics Electrode

Metrics

Cited By

1.01

FWCI (Field Weighted Citation Impact)

Refs

0.59

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Combustion and flame dynamics

Physical Sciences → Engineering → Computational Mechanics

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Heat Transfer and Boiling Studies

Physical Sciences → Engineering → Mechanical Engineering

Design, modeling, fabrication, packaging and characterization of MEMS screech sensor

Metrics

Citation History

Topics

Related Documents

Design, modeling, fabrication and characterization of a MEMS acceleration sensor for acoustic emission testing

Design, Fabrication and Characterization of a MEMS Thermal Displacement Sensor

Design, fabrication and characterization of bulk-type MEMS high pressure sensor

Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry

Design, fabrication, and characterization of hemispherical glass optics for MEMS mirror packaging applications