JOURNAL ARTICLE

Design, modeling, fabrication, packaging and characterization of MEMS screech sensor

A. SthuthiG. NithyaVeda Sandeep Nagaraja

Year: 2022 Journal:   Materials Today Proceedings Vol: 59 Pages: 1132-1137   Publisher: Elsevier BV
Keywords:
Capacitance Multiphysics Microelectromechanical systems Sensitivity (control systems) Fabrication Acoustics Engineering Instrumentation (computer programming) Thrust Electronic engineering Electrical engineering Mechanical engineering Materials science Computer science Finite element method Optoelectronics Physics Electrode

Metrics

4
Cited By
1.01
FWCI (Field Weighted Citation Impact)
3
Refs
0.59
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Combustion and flame dynamics
Physical Sciences →  Engineering →  Computational Mechanics
Advanced Sensor Technologies Research
Physical Sciences →  Engineering →  Biomedical Engineering
Heat Transfer and Boiling Studies
Physical Sciences →  Engineering →  Mechanical Engineering
© 2026 ScienceGate Book Chapters — All rights reserved.