Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry

Wenshu Sui

doi:10.14711/thesis-991012532267203412

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Design, fabrication and packaging of capacitive MEMS microphone using MEMS foundry

Wenshu Sui

Year: 2017

DOI: 10.14711/thesis-991012532267203412

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Keywords:

Microelectromechanical systems Fabrication Capacitive sensing Foundry Microphone Materials science Engineering Mechanical engineering Electrical engineering Optoelectronics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Modular Robots and Swarm Intelligence

Physical Sciences → Engineering → Mechanical Engineering

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

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