DISSERTATION
Metastable defects in hydrogenated amorphous silicon nitride
Keywords:
Metastability Materials science Nitride Silicon Amorphous solid Silicon nitride Amorphous silicon Metallurgy Nanotechnology Crystallography Crystalline silicon Chemistry Layer (electronics)
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Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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