JOURNAL ARTICLE

Defects in amorphous hydrogenated silicon nitride films

Jerzy KanickiW. L. Warren

Year: 1993 Journal:   Journal of Non-Crystalline Solids Vol: 164-166 Pages: 1055-1060   Publisher: Elsevier BV
Keywords:
Amorphous solid Materials science Silicon nitride Amorphous silicon Nitride Optoelectronics Thin film Silicon Nanocrystalline silicon Nanotechnology Engineering physics Crystalline silicon Crystallography Chemistry Physics Layer (electronics)

Metrics

21
Cited By
3.22
FWCI (Field Weighted Citation Impact)
32
Refs
0.93
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry

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