Defects in amorphous hydrogenated silicon nitride films

Jerzy Kanicki; W. L. Warren

doi:10.1016/0022-3093(93)91180-b

ScienceGate Book Chapters

JOURNAL ARTICLE

Defects in amorphous hydrogenated silicon nitride films

Jerzy Kanicki W. L. Warren

Year: 1993 Journal: Journal of Non-Crystalline Solids Vol: 164-166 Pages: 1055-1060 Publisher: Elsevier BV

DOI: 10.1016/0022-3093(93)91180-b

Get Full-Text PDF Get Analytical Report

Keywords:

Amorphous solid Materials science Silicon nitride Amorphous silicon Nitride Optoelectronics Thin film Silicon Nanocrystalline silicon Nanotechnology Engineering physics Crystalline silicon Crystallography Chemistry Physics Layer (electronics)

Metrics

Cited By

3.22

FWCI (Field Weighted Citation Impact)

Refs

0.93

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Defects in amorphous hydrogenated silicon nitride films

Metrics

Citation History

Topics

Related Documents

Metastable defects in hydrogenated amorphous silicon nitride

Stable photoinduced paramagnetic defects in hydrogenated amorphous silicon nitride

Electrically neutral nitrogen dangling-bond defects in amorphous hydrogenated silicon nitride thin films

Photoluminescence analyses of hydrogenated amorphous silicon nitride thin films

Optical properties of amorphous hydrogenated silicon nitride thin films