Electrostatically Actuated Initially Curved Micro Beams: Analytical and Finite Element Modelling

N. V. Mozhgova; Alexey Lukin; И. А. Попов; Dmitriy A. Indeitsev

doi:10.1007/978-3-030-77310-6_21

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Electrostatically Actuated Initially Curved Micro Beams: Analytical and Finite Element Modelling

N. V. Mozhgova Alexey Lukin И. А. Попов Dmitriy A. Indeitsev

Year: 2021 Springer proceedings in mathematics & statistics Pages: 237-251 Publisher: Springer International Publishing

DOI: 10.1007/978-3-030-77310-6_21

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Keywords:

Finite element method Curvature Microelectromechanical systems Mechanical engineering Automotive industry Microfabrication Bistability Buckling Beam (structure) Structural engineering Materials science Engineering Mechanics Geometry Physics Nanotechnology Fabrication Mathematics Aerospace engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced machining processes and optimization

Physical Sciences → Engineering → Mechanical Engineering

Electrostatically Actuated Initially Curved Micro Beams: Analytical and Finite Element Modelling

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