Dynamic stability of electrostatically actuated initially curved shallow micro beams

Slava Krylov; Nir Dick

doi:10.1007/s00161-010-0149-6

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Dynamic stability of electrostatically actuated initially curved shallow micro beams

Slava Krylov Nir Dick

Year: 2010 Journal: Continuum Mechanics and Thermodynamics Vol: 22 (6-8)Pages: 445-468 Publisher: Springer Science+Business Media

DOI: 10.1007/s00161-010-0149-6

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Keywords:

Bistability Curvature Beam (structure) Instability Actuator Mechanics Buckling Work (physics) Materials science Inertial frame of reference Voltage Bending Physics Classical mechanics Computer science Optics Geometry Optoelectronics Mathematics

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Dynamic stability of electrostatically actuated initially curved shallow micro beams

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