BOOK-CHAPTER
Step and Stamp Imprint Lithography
Year: 2003 Nanostructure science and technology Pages: 103-115 Publisher: Springer Nature
Keywords:
Next-generation lithography Lithography Stencil lithography X-ray lithography Extreme ultraviolet lithography Nanoimprint lithography Electron-beam lithography Computational lithography Materials science Multiple patterning Immersion lithography Maskless lithography Resist Optics Nanotechnology Optoelectronics Physics Fabrication
Metrics
5
Cited By
1.17
FWCI (Field Weighted Citation Impact)
17
Refs
0.75
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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BOOK-CHAPTER
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