JOURNAL ARTICLE

Nickel stamp fabrication using step & stamp imprint lithography

Tomi HaatainenPäivi MajanderTommi RiekkinenJouni Ahopelto

Year: 2006 Journal:   Microelectronic Engineering Vol: 83 (4-9)Pages: 948-950   Publisher: Elsevier BV
Keywords:
Wafer Electroplating Nickel Materials science Lithography Plating (geology) Fabrication Substrate (aquarium) Silicon Patterned media Optoelectronics Layer (electronics) Nanotechnology Metallurgy Grain size

Metrics

42
Cited By
2.88
FWCI (Field Weighted Citation Impact)
4
Refs
0.89
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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