Phase composition investigation of titanium oxide nanostructures obtained by the local anodic oxidation

V I Avilov; V. A. Smirnov; R V Tominov; N A Sharapov; N A Polupanov; O A Ageev

doi:10.1088/1757-899x/699/1/012003

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Phase composition investigation of titanium oxide nanostructures obtained by the local anodic oxidation

V I Avilov V. A. Smirnov R V Tominov N A Sharapov N A Polupanov O A Ageev

Year: 2019 Journal: IOP Conference Series Materials Science and Engineering Vol: 699 (1)Pages: 012003-012003 Publisher: IOP Publishing

DOI: 10.1088/1757-899x/699/1/012003

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Abstract

Abstract The paper presents the results of a phase composition study of titanium oxide nanostructures obtained by local anodic oxidation. A mathematical model was presented, which made it possible to calculate the distribution of oxide phases in the nanostructure volume. The results of the X-ray photoelectron spectroscopy (XPS) spectrum analysis are presented, which are consistent with theoretical calculations.

Keywords:

X-ray photoelectron spectroscopy Nanostructure Titanium Oxide Materials science Titanium oxide Anode Anodic oxidation Phase (matter) Composition (language) Chemical engineering Nanotechnology Chemistry Metallurgy Electrode Physical chemistry

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Advanced Memory and Neural Computing

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Phase composition investigation of titanium oxide nanostructures obtained by the local anodic oxidation

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