Patterning surface oxide nanostructures using atomic force microscope local anodic oxidation

Tae Young Kim; E. Di Zitti; D. Ricci; Silvano Cincotti

doi:10.1016/j.physe.2007.08.085

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Patterning surface oxide nanostructures using atomic force microscope local anodic oxidation

Tae Young Kim E. Di Zitti D. Ricci Silvano Cincotti

Year: 2007 Journal: Physica E Low-dimensional Systems and Nanostructures Vol: 40 (6)Pages: 1941-1943 Publisher: Elsevier BV

DOI: 10.1016/j.physe.2007.08.085

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Keywords:

Nanostructure Materials science Oxide Fabrication Anodic oxidation Nanotechnology Atomic force microscopy Biasing Anode Titanium oxide Voltage Optoelectronics Analytical Chemistry (journal) Electrode Chemical engineering Metallurgy Chemistry Electrical engineering

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Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

Patterning surface oxide nanostructures using atomic force microscope local anodic oxidation

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