Tunable High Quality-Factor Silicon Microring Resonator Driven by High-Mobility Transparent Conductive Oxide

Wei-Che Hsu; Cheng Zhen; Alan X. Wang

doi:10.1364/cleo_si.2021.sth1q.3

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Tunable High Quality-Factor Silicon Microring Resonator Driven by High-Mobility Transparent Conductive Oxide

Wei-Che Hsu Cheng Zhen Alan X. Wang

Year: 2021 Journal: Conference on Lasers and Electro-Optics Vol: 20 Pages: STh1Q.3-STh1Q.3

DOI: 10.1364/cleo_si.2021.sth1q.3

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Abstract

We demonstrated a silicon microring resonator driven by a titanium-doped indium oxide capacitor with 10 nm hafnium oxide insulator, achieving a high quality-factor of 11,700 with a high electro-optic tunability of 120 pm/V.

Keywords:

Materials science Resonator Optoelectronics Silicon on insulator Silicon Capacitor Q factor Oxide Indium tin oxide Indium Doping Electrical conductor Titanium Nanotechnology Electrical engineering Thin film Voltage Composite material

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Tunable High Quality-Factor Silicon Microring Resonator Driven by High-Mobility Transparent Conductive Oxide

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