JOURNAL ARTICLE

Chemical Vapor Deposition of NbS<sub>2</sub> from a Chloride Source

Takashi YanaseShinya WatanabeMengting WengTaro NagahamaTadashi Shimada

Year: 2019 Journal:   Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials
Keywords:
Materials science Chemical vapor deposition Deposition (geology) Chloride Optoelectronics Nanotechnology Analytical Chemistry (journal) Environmental chemistry Metallurgy Chemistry

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0.52
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Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Advanced materials and composites
Physical Sciences →  Engineering →  Mechanical Engineering

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