Keywords:
Environmental science Computer science

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
4
Refs
0.29
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced machining processes and optimization
Physical Sciences →  Engineering →  Mechanical Engineering
Adhesion, Friction, and Surface Interactions
Physical Sciences →  Engineering →  Mechanics of Materials

Related Documents

BOOK-CHAPTER

Post-CMP Cleaning

Yufei ChenK. MikhaylichenkoBrian J. BrownFritz Redeker

Elsevier eBooks Year: 2018 Pages: 253-301
BOOK-CHAPTER

Post-CMP Cleaning

Manish KeswaniZhenxing Han

Elsevier eBooks Year: 2014 Pages: 145-183
BOOK-CHAPTER

Post-CMP cleaning

Year: 2005 Pages: 181-188
BOOK-CHAPTER

Copper Post-CMP Cleaning

David StarosvetskyYair Ein‐Eli

Year: 2009 Pages: 379-386
JOURNAL ARTICLE

Post-CMP Cleaning Applications

Vishal KhoslaMichael VinogradovNorm GitisRakesh Kumar SinghDavid W. StockbowerChristopher Wargo

Journal:   STLE/ASME 2008 International Joint Tribology Conference Year: 2008 Pages: 719-720
© 2026 ScienceGate Book Chapters — All rights reserved.