JOURNAL ARTICLE
Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication
Kristina BespalovaElmeri ÖsterlundGlenn RossMervi Paulasto‐KröckelAbhilash Thanniyil SebastianCyril Baby KaruthedathStefan MertinTuomas Pensala
Year: 2021 Journal: Journal of Microelectromechanical Systems Vol: 30 (2)Pages: 290-298 Publisher: Institute of Electrical and Electronics Engineers
Abstract
| openaire: EC/H2020/783132/EU//POSITION-II
Keywords:
Materials science Annealing (glass) Piezoelectricity Thermal stability Electrode Fabrication Analytical Chemistry (journal) Composite material Physical chemistry Chemistry Organic chemistry
Metrics
17
Cited By
1.48
FWCI (Field Weighted Citation Impact)
36
Refs
0.78
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
GaN-based semiconductor devices and materials
Physical Sciences → Physics and Astronomy → Condensed Matter Physics
Ultrasonics and Acoustic Wave Propagation
Physical Sciences → Engineering → Mechanics of Materials
Related Documents
JOURNAL ARTICLE
Design, Fabrication, and Characterization of Dual-Electrode Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Geometries
Yumna BirjisHaleh NazemiJae‐Woo ParkArezoo Emadi
Journal: IEEE Sensors Journal Year: 2025 Vol: 25 (14)Pages: 26499-26506
JOURNAL ARTICLE
Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film
Junhong LiWei RenGuoxiang FanChenghao Wang
Journal: Sensors Year: 2017 Vol: 17 (6)Pages: 1381-1381
JOURNAL ARTICLE
Optimization in the Design and Fabrication of a PZT Piezoelectric Micromachined Ultrasound Transducer (PMUT)
Year: 2018 Pages: 743-743
JOURNAL ARTICLE
Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array
Sanjog Vilas JoshiSina SadeghpourMichaël Kraft
Journal: Sensors Year: 2023 Vol: 23 (10)Pages: 4826-4826