JOURNAL ARTICLE
Flexible Soi-Based Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays
Abstract
sponsorship: This work was supported by the European Union's Horizon 2020 program under grant agreement No 665347, as well as by FP7 program, ERC advanced grant No 340931. (European Union|665347, FP7 program, ERC|340931)
Keywords:
PMUT Deep reactive-ion etching Materials science Piezoelectricity Silicon on insulator Miniaturization Acoustics Silicon Transducer Capacitive micromachined ultrasonic transducers Ultrasonic sensor Etching (microfabrication) Optoelectronics Electronic engineering Engineering Reactive-ion etching Nanotechnology
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17
Cited By
1.40
FWCI (Field Weighted Citation Impact)
9
Refs
0.78
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Citation History
Topics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Dielectric materials and actuators
Physical Sciences → Engineering → Biomedical Engineering
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