JOURNAL ARTICLE
A squared bossed diaphragm piezoresistive pressure sensor based on CNTs for low pressure range with enhanced sensitivity
Year: 2021 Journal: Microsystem Technologies Vol: 27 (8)Pages: 3225-3233 Publisher: Springer Science+Business Media
Keywords:
Piezoresistive effect Diaphragm (acoustics) Materials science Resistor Pressure sensor Sensitivity (control systems) Linearity Microelectromechanical systems Carbon nanotube Pressure measurement Optoelectronics Acoustics Electrical engineering Composite material Electronic engineering Vibration Mechanical engineering Engineering Voltage
Metrics
29
Cited By
2.02
FWCI (Field Weighted Citation Impact)
35
Refs
0.88
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
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