Bossed Diaphragm Piezoresistive Pressure Microsensor with Improved Sensitivity and Linearity

Ashudeep; Balwinder Singh

doi:10.1166/sl.2017.3796

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JOURNAL ARTICLE

Bossed Diaphragm Piezoresistive Pressure Microsensor with Improved Sensitivity and Linearity

Ashudeep Balwinder Singh

Year: 2017 Journal: Sensor Letters Vol: 15 (2)Pages: 172-179 Publisher: American Scientific Publishers

DOI: 10.1166/sl.2017.3796

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Keywords:

Piezoresistive effect Diaphragm (acoustics) Linearity Sensitivity (control systems) Materials science Pressure sensor Mechanical engineering Electrical engineering Electronic engineering Composite material Engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Bossed Diaphragm Piezoresistive Pressure Microsensor with Improved Sensitivity and Linearity

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