AN ULTRA-SENSITIVE CAPACITIVE PRESSURE SENSOR WITH A BOSSED DIELECTRIC DIAPHRAGM

Y. Zhang; K.D. Wise

doi:10.31438/trf.hh1994.47

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AN ULTRA-SENSITIVE CAPACITIVE PRESSURE SENSOR WITH A BOSSED DIELECTRIC DIAPHRAGM

Y. Zhang K.D. Wise

Year: 1994 Pages: 205-208

DOI: 10.31438/trf.hh1994.47

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Keywords:

Capacitive sensing Dielectric Diaphragm (acoustics) Materials science Pressure sensor Capacitance Acoustics Electrical engineering Optoelectronics Electronic engineering Engineering Physics Mechanical engineering Electrode Vibration

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

AN ULTRA-SENSITIVE CAPACITIVE PRESSURE SENSOR WITH A BOSSED DIELECTRIC DIAPHRAGM

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Citation History

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