JOURNAL ARTICLE

AN ULTRA-SENSITIVE CAPACITIVE PRESSURE SENSOR WITH A BOSSED DIELECTRIC DIAPHRAGM

Keywords:
Capacitive sensing Dielectric Diaphragm (acoustics) Materials science Pressure sensor Capacitance Acoustics Electrical engineering Optoelectronics Electronic engineering Engineering Physics Mechanical engineering Electrode Vibration

Metrics

13
Cited By
1.78
FWCI (Field Weighted Citation Impact)
0
Refs
0.87
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Sensor Technology and Measurement Systems
Physical Sciences →  Computer Science →  Computer Networks and Communications
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