A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure

Tingzhong Xu; Libo Zhao; Zhuangde Jiang; Xin Guo; Jianjun Ding; Xiang Wei; Yulong Zhao

doi:10.1016/j.sna.2016.04.027

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A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure

Tingzhong Xu Libo Zhao Zhuangde Jiang Xin Guo Jianjun Ding Xiang Wei Yulong Zhao

Year: 2016 Journal: Sensors and Actuators A Physical Vol: 244 Pages: 66-76 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2016.04.027

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Keywords:

Linearity Diaphragm (acoustics) Sensitivity (control systems) Pressure sensor Piezoresistive effect Materials science Finite element method Chip Microelectromechanical systems Electronic engineering Optoelectronics Acoustics Electrical engineering Structural engineering Engineering Mechanical engineering Physics

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure

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