BOOK-CHAPTER

High-Aspect-Ratio Micromachining

Keywords:
Surface micromachining Materials science Aspect ratio (aeronautics) Composite material Fabrication Medicine

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
1
Refs
0.29
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Advanced machining processes and optimization
Physical Sciences →  Engineering →  Mechanical Engineering
Advanced Machining and Optimization Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

Related Documents

JOURNAL ARTICLE

High aspect-ratio polysilicon micromachining technology

Farrokh AyaziKhalil Najafi

Journal:   Sensors and Actuators A Physical Year: 2000 Vol: 87 (1-2)Pages: 46-51
JOURNAL ARTICLE

High-aspect-ratio bulk micromachining of titanium

Marco AimiMasaru P. RaoNoel C. MacDonaldAbu Samah ZuruziDavid P. Bothman

Journal:   Nature Materials Year: 2004 Vol: 3 (2)Pages: 103-105
JOURNAL ARTICLE

Reactive ion etching for high aspect ratio silicon micromachining

Ivo W. Rangelow

Journal:   Surface and Coatings Technology Year: 1997 Vol: 97 (1-3)Pages: 140-150
JOURNAL ARTICLE

High aspect ratio micromachining (HARM) technologies for microinertial devices

Mark E. McNieD.O. KingC. VizardAndrew S. HolmesK. W. Lee

Journal:   Microsystem Technologies Year: 2000 Vol: 6 (5)Pages: 184-188
JOURNAL ARTICLE

Manufacturing of microstructures with high aspect ratio by micromachining

Thomas GietzeltL. EichhornK. R. Schubert

Journal:   Microsystem Technologies Year: 2008 Vol: 14 (9-11)Pages: 1525-1529
© 2026 ScienceGate Book Chapters — All rights reserved.