JOURNAL ARTICLE
Deposition of Organic Thin Films by Magnetron Sputtering
Year: 2019 Journal: Journal of The Adhesion Society of Japan Vol: 55 (11)Pages: 394-403
Keywords:
Sputter deposition Deposition (geology) Materials science Thin film Cavity magnetron High-power impulse magnetron sputtering Sputtering Optoelectronics Chemical engineering Nanotechnology Engineering physics Geology Physics Engineering
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32
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0.15
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Topics
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
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